MKS DA02B 絶対静電容量マノメーター (0.1Torr; 100°C; EtherCAT)

Measurement Type: Absolute

Sensor Temperature: 100°C

Full Scale Range: 0.1 Torr

Accuracy: 0.5% of Reading

Fitting Type: 0.5 in. OD tube

Communication Protocol: EtherCAT

Analog Output: 0-10 VDC

Analog Connector: 15-pin D-sub

Digital Connector: 2 RJ45 EtherCAT jacks

Calibration: Vertical

Zero Temperature Coefficient: 0.010% of Full Scale/°C

Span Temperature Coefficient: 0.02% of Reading/°C

Operating Temperature Range: 15-50°C

Volume: 6.3 cc

Warm-up Time: 4 hours

Overpressure Limit: 45 psia (310 kPa) or 120% of Full Scale, whichever is greater

Exposed Materials: Inconel® and Incoloy® nickel alloys

Compliance: CE

For specific range please check the attachment below!

Literature 

Application Notes

Manual

Drawing