MKS DA06A 温度制御絶対デジタル静電容量 (1 Torr; EtherCAT)

Full Scale Pressure Ranges: 1 Torr

Resolution: 0.001% Full Scale

Accuracy: 1000 mT to 10mT: ±0.4% of Reading

                 8 mT: ±0.5% of Reading

                 5 mT: ±0.7% of Reading

                 3 mT: ±0.8% of Reading

                 2 mT: ±1.0% of Reading

                 1 mT3: : ±1.5% of Reading

Temperature Coefficients:

- Zero: 0.002% Full Scale/°C

- Span: 0.02% Reading/°C

Response Time

- Pressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting

- EtherCAT: Refresh Rate 1 ms

Ambient Operating Temperature: 15° to 60°C (15-40 for 45°C manometer)

Internal Volume: 6.3 cm3 typical.

Warmup Time: 4 hours

Overpressure Limit: 45 psia (310 kPA)

Materials Exposed to Process Gases: Inconel® and Incoloy® nickel alloys (Fittings 300 Series Stainless Steel)

Input Power: +24 VDC ±10% @ 700 mA max

                      ±15 VDC ±5% @ 700 mA max

Output Signal: Digital EtherCAT

Electrical Connectors:

- Power: 15-pin D-subminiature male

- EtherCAT: Two (2) RJ45 female receptacles for incoming and network signals

Connection Fittings: 0.50'' OD tube, 8 VCR Female, 8 VCR Male, NW16-KF, NW25-KF, Mini-CF 1.33''

Compliance: CE, UKCA

For specific range please check the attachment below!

Literature