MKS DPC マスフローメーター付きデュアルゾーン圧力コントローラー (10-100 Torr)

Type: Dual Pressure Controller

Control Method: Absolute pressure capacitance manometer

Pressure Range: 10, 20, 50, 100 Torr

Fitting Type: Swagelok® 4 VCR® male compatible

Pressure Control Accuracy: ±0.5% of Reading

Transducer Over Pressure Limit: 45 psia or 200% Full Scale, whichever is greater

Control Mode: Analog Integral Adjustments: 10 positions (0 through 9)

Analog Proportional Adjustments: 10 positions (0 through 9)

Control Range: 10-100% Full Scale

Operating Temperature: 15 to 50°C (59 to 122°F)

Storage Temperature: -20 to 80°C (-4 to 176°F)

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Flow Measurement Range: 10, 20, 50, 100 sccm

Maximum Inlet Pressure: 45 psia

Flow Accuracy: ±1.0% of Full Scale

Cable Length: 100 feet (maximum)

Weight: 10.5 lbs. (4.8 Kg)

Dimensions: 10.46 in (including fittings) x 3.36 in x 5.35 in

                     26.56 cm (including fittings) x 8.53 cm x 13.59 cm

For specific range please check the attachment below!

Literature