MKS E28H 加熱された絶対静電容量マノメーター (Etch Sensor; 0.1Torr; 100°C; 8VCR-F)

Measurement Type: Absolute

Sensor Temperature: 100°C

Full Scale Range: 0.1 Torr

Accuracy: 0.50% of Reading

Resolution: 0.001% of Full Scale

Fitting Type: 8 VCR female

Analog Output: 0-10 VDC

Analog Connector: 15-pin D-sub with Thread Locks

Calibration: Horizontal

Zero Temperature Coefficient: 0.01% of Full Scale/°C

Span Temperature Coefficient: 0.02% of Reading/°C

Operating Temperature Range: 15-40°C

Volume: 6.3 cc

Warm-up Time: 4 hours

Overpressure Limit: 45 psia (310 kPa) or 120% of Full Scale, whichever is greater

Exposed Materials: Inconel®

Power Requirements: ±15 VDC ±5% @ 0.6 Amps (max.)

Indicators: No

Compliance: CE

For specific range please check the attachment below!

Literature

Application Note

Manual

Drawing