MKS E-VISION-2 汎用型残留ガス分析器 (1-100 amu; Faraday)

Measurement Technique: Mass Spectrometry

Mass Range: 1-100 amu

Detector: Faraday

Ion Source: Open

Filaments: Tungsten

Software: Built-in web application

Filter length: 4 in. (100 mm)

Maximum Analyzer Operating Pressure: 1e-4 Torr (1.3e-4 mbar)

Ion Source Sensitivity: 2e-4 A/mbar

Mass Stability: ±0.1 amu over 8 hours at stable ambient

Resolution: Better than 10% valley for peaks of equal height across mass range

Bake Out Temperature: 250°C with electronics removed

Maximum Operating Conditions: 10 - 40°C, 80% RH (non condensing)

Power: 24 VDC, 2A external universal voltage supply (included)

Settling Time: <20 ms

Control Method: CE operating system processor with web-server interface

Compliance: CE

Literature

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