MKS GE250A-MFM エラストマー封入質量流量計 (100-250 slm)

Measurement Ranges: 0.1% to 100 % of Full Scale

Full Scale Flow Range: 100-250 slm (N2 equivalent)

Maximum Inlet Pressure: 150 psig

Burst Pressure: 1500 psig

Typical Accuracy: ±1% of Reading

Repeatability: ±0.5% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.03% of Reading/psi or less

Warm-up Time: 1 hour

Operating Temperature: 10-50°C

Storage Humidity: 0 to 95% relative humidity, non-condensing

Storage Temperature: -20° to 65°C (-4° to 149°F)

Power Requirements: +15 to +24 VDC @ (<2 watts)

Weight: <3.4 lbs (1.54 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing