MKS GPCMA マスフローメータ付き汎用下流圧力コントローラ (500-2000Torr)

Type: GPCMA Absolute Pressure Controller with Mass Flow Meter

Pressure Range: 500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale

Fitting Type: Swagelok® 4 VCR Male

                    1-1/8 inch surface mount (C-seal, W-seal)

                    1/4 inch Swagelok compression seal

Valve Position: Normally Closed

Valve Seat: PTFE (Teflon®)

Flow Rate: 5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000, 50000 (N2 equivalent)

Pressure Readout Units: Torr, kPa, psi, mbar

Pressure Resolution: 0.1 Torr

Pressure Control Accuracy: ±1.0% of Reading >20% Full Scale

                                             ±0.2% of Full Scale <20% of Full Scale Flow (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

Transducer Over Pressure Limit: 2x Full Scale for all ranges

Maximum Differential Pressure: 45 psid

Burst Pressure: 1500 psig

Pressure Measurement Accuracy: ±0.5% of Reading

Control Range: >2 to 100% of Full Scale

Typical Response Time: <1.0 second

Operating Temperature: 10-50°C (50-to 122°F)

Storage Temperature: -20-80°C (-4-176°F)

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Flow Measurement Range: 2% to 100% of Full Scale

Flow Repeatability: ±0.3% of Reading

Flow Resolution: 0.1% of Full Scale

Flow Accuracy: ±1.0% of Reading >20% of Full Scale

                          ±0.2% of Full Scale (>20% of Full Scale flow)

(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

Weight: <3 lbs (1.36 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing