MKS GV50A デジタルマスフローコントローラー (50 slm, Shut-off Valve)

Control Range: 2-100% of Full Scale

Full Scale Flow Range: 5-50,000 sccm

Fitting Type: Compatible with: 6 mm Swagelok, 8 mm Swagelok, 10 mm Swagelok, 12 mm Swagelok, 0.125 in. Swagelok (for 1000 sccm N2 equivalent or below), 0.25 in. Swagelok, 0.5 in. Swagelok, 0.375 in. Swagelok, Swagelok 4 VCO male, Swagelok 4 VCR male, Swagelok 8 VCR male, Swagelok 8 VCO Male, Swagelok 2 VCR Male (for 1000 sccm N2 equivalent or below), KF-16

Seal Material: Viton®, Buna-N, Neoprene®, EPDM, Kalrez

Connector: EtherCAT, DeviceNet, RS485 (9 pin connector), Profibus (1480 Compatible), Profibus (1179B Compatible), PROFINET, 9 pin D connector (Analog 0-5 VDC), 9 Pin D connector, Tied Grounds (Analog 0-5 VDC), 15 pin D connector (Analog 0-5 VDC), 15 pin D connector, Tied Grounds (Analog 0-5 VDC), 15 pin D connector (Analog 4-20 mA)

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 10-5000 sccm; 10-40 psid, 10000-0000 sccm; 15-40 psid, 30000-50000 sccm; 25-40 psid

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Typical Accuracy: ± 1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale

Repeatability: ± 0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: < 0.05% of Full Scale/°C

Span Temperature Coefficient: < 0.08% of Reading/°C

Inlet Pressure Coefficient: < 0.02% of Reading/psi

Typical Settling Time: <750 msec, typical above 5% Full Scale

Warm-up Time: 30 minutes

Operating Temperature: 10-50°C

Storage Humidity: 0-95% Relative Humidity, non-condensing

Storage Temperature: -20° to 80°C

Wetted Materials: 316L S.S. VAR, 316 S.S., Elgiloy®, KM-45

Surface Finish: 16µ inch average Ra

Weight: 3 lbs (1.4 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing