MKS HPQ3 高圧残量ガス分析器 (1-100 amu; 0.001 Torr)

Mass Range: 1-100 amu

Filaments: Twin Tungsten or Thoria Coated Iridium

Detector: Faraday

Maximum Analyzer Operating Pressure: 0.001 Torr (0.0013 mbar)

Minimum Detectable Partial Pressure: 8e^-11 Torr (1e^-10 mbar)

Minimum Detectable Concentration: 5ppm at 0.001 Torr (0.0013 mbar)

Mass Stability: ±0.1 amu over 8 hours at stable ambient

Resolution: Better than 10% valley for peaks of equal height across mass range

Mounting Flange: DN38CF (70mm/2.75inch OD) Conflat

Bake Out Temperature: 250°C with electronics removed

Operating Temperature: Electronics: 10-40°C

Power Requirements: 24V DC, 3A external universal voltage supply (included)

Maximum Operating Conditions: 80% RH (non condensing)

Communication: 10/100 Base-T Ethernet, static or automatically assigned IP addresses

Settling Time: < 20ms to 1 ppm of Maximum Signal

Control Method: CE operating system processor with web-server interface

Command Structure: Documented SDK and ASCII command protocols

Compliance: CE (control unit)

Literature

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