MKS IE1000A 高性能マスフローコントローラー (500-1000 slm; IP66)

Full Scale Flow Range: 501-1000 slm (N2 equivalent)

Fitting Type: Compatible with: 12 mm Swagelok; 0.5 in. tube compression; 0.75 in. compression; 0.5 in. NPT female; 0.75 in. NPT female; 8 VCR male; 8 VCO male

Connector: Profibus; PROFINET; 15 pin D (Analog 0-5 VDC I/O); 15 pin D (4-20 mA I/O)

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 40-50 psid

Burst Pressure: 1500 psig

Control Range: 2-100% of Full Scale

Typical Accuracy: ±1% of set point for >20% to 100% Full Scale

                             ± 0.25% of Full Scale for 5% to 20% Full Scale

Repeatability: ±0.5% of Reading

Resolution: 0.1% of Reading

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.08% of Reading/psi

Typical Settling Time: <3 sec typical above 10% Full Scale @ 50 psi

Warm-up Time: 1 hour

Operating Temperature: 10-50°C

Storage Humidity: 0-95% Relative Humidity, non-condensing

Storage Temperature: -20° to 65°C

Enclosure Rating: IP66

Power Requirements: 15-24 VDC @ (<8 watts)

Flow Input Output Signal: Voltage: 0-5 VDC

                                         Current: 4-20 mA

Analog I/O Connector: Voltage:15-pin Type "D" male

                                    Current: 15-pin Type "D" male

Weight: 12.7 lbs. (5.8 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing