MKS IM100A デジタルマスフローコントローラー (50 - 100 slm; IP66)

Full Scale Flow Range: 50,000 to 100,000 sccm (N2 equivalent)

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 50,000 - 100,000 sccm; 40 to 80 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Control Range: 2% to 100% of Full Scale

Typical Accuracy: ±1% of set point for 20 to 100% Full Scale

                             ±0.2% of Full Scale for 2 to 20% Full Scale

Repeatability: ±0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Rdg./°C

Inlet Pressure Coefficient: <0.02% of Rdg./psi

Typical Settling Time: <750 msec., typical above 10% Full Scale

Warm-up Time: 30 minutes

Operating Temperature: 10° to 50°C

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Storage Temperature: -20° to 80°C

Valve Seat Material: EPDM (Class VI), EPDM, Viton® (Class VI), Viton, Buna, or Neoprene

Wetted Materials: 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel

Surface Finish: 10µ inch average Ra (electropolished)

Enclosure Rating: IP66

Power Requirements: +15 to +24 VDC @ (<4 watts)

Flow Input Output Signal: Voltage: (0 to 5 VDC) 15 pin Type "D" male

                                         Current: (4 to 20 mA) 15 pin Type "D" male

Weight: 3 lbs (1.4 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing