MKS MICROVISION-2 フレキシブルで統合可能な残留ガス分析器 (100, 200, 300 amu)

Measurement Technique: Mass Spectrometry

Mass Range: 100, 200, or 300 amu

Detector: Faraday

Faraday: 1.5e-11 Torr (2e-11 mbar)

Filaments: Tungsten or Thoria coated Iridium

Maximum Analyzer Operating Pressure: 7.6 x 10^-5 Torr

Ion Source Sensitivity: 2.0 x 10^-4 A/mbar

Minimum Detectable Concentration: 3 standard deviations of baseline noise at 300 ms integration

Resolution: Better than 10% valley for peaks of equal height across mass range

Bake Out Temperature: 250°C (with extender or electronics removed)

UHV Out-gassing Rate: <1e-9 mbar -l/s

Microchannel plate: 3.8e-14 Torr (5e-14 mbar)

Single channel EM: 7.6e-15 Torr (1e-14 mbar) triple configuration only

Mounting Flange: DN 40 CF-F

For specific range please check the attachment below!

Literature

Drawing