MKS P4B 高性能マスフローコントローラー (5 sccm - 50 slm)

Full Scale Flow Range: 5 - 50,000 sccm (N2 equivalent)

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 5 to 5000 sccm (10 to 40 psid)

                                                               10000 to 20000 sccm (15 to 40 psid)

                                                               30000 to 50000 sccm (25 to 40 psid)

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Control Range: 2% to 100% of Full Scale

Typical Accuracy: ±1% of set point for 20 to 100% Full Scale

                             ±0.2% of Full Scale for 2 to 20% Full Scale

Repeatability: ±0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: < 0.05% of Full Scale/°C

Span Temperature Coefficient: < 0.08% of Reading/°C

Inlet Pressure Coefficient: < 0.02% of Reading/psi

Typical Settling Time: < 750 msec., typical above 5% Full Scale

Warm-up Time: 30 minutes

Operating Temperature: 10° to 50°C

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Storage Temperature: -20° to 80°C

Temperature Display: 0 to 100°C

Temperature Accuracy: ±2°C

Temperature Resolution: 0.1°C

Display: 4 digits for value, 4 characters for unit

Valve Seat Material: PTFE (Teflon)

Weight: 3 lbs (1.4 kg)

Compliance: CE

Power Requirements: +15 to +24 VDC @ 350mA max

Analog I/O Connector: 15-pin Type "D" Male, 9 pin Type "D" Male

Flow Input Output Signal: 0 to 5 VDC

For specific range please check the attachment below!

Literature

Drawing