MKS PPCA コントローラ一体型の高性能圧力調整弁 (10-1000 Torr)

Type: PPCA Absolute Pressure Controller

Pressure Range: 10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale

Fitting Type: Swagelok® 4 VCR Male

Valve Seat: PTFE (Teflon®) or Elastomer (Viton®), Buna-N, Neoprene, EPDM

Flow Rate: 50, 200, 1000, 5000, 10000, 20000, 30000, 50000 (sccm)

Pressure Readout Units: Torr, kPa, mbar

Pressure Resolution: 0.1 Torr

Pressure Control Accuracy: ±1.0% of Reading (≥10% Full Scale)

                                             ±0.2% of Full Scale (<10% Full Scale)

Transducer Over Pressure Limit: 2x Full Scale for all ranges

Maximum Differential Pressure: 45 psid

Burst Pressure: 1500 psig

Pressure Measurement Accuracy: ±0.5% of Reading

Control Range: >5 to 100% of Full Scale

Typical Response Time: <1.0 second (excluding system time constant)

Operating Temperature: 10 to 50°C (50 to 122°F)

Storage Temperature: -20 to 80°C (minus 4 to176°F)

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Weight: <3 lbs (1.36 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing