MKS VISION-2000-A ALD & CVD用RGA (1-100; 1-200; 1-300 amu)

Mass Range: 1-100, 1-200, or 1-300 amu

Ion Source: High conductance closed ion source

Filaments: Independently replaceable twin Tungsten or Thoria filaments

Mass Filter: Double filter (1-inch "RF only" pre-filter with 4-inch main filter)

Detector: Dual (Faraday and secondary electron multiplier)

Maximum Analyzer Operating Pressure: 1e^-3 Torr at the ion source inlet (standard), higher pressure optional

Minimum Detectable Partial Pressure: <2e^-12 Torr (for total pressures <1e^-4 Torr on baseline inlet)

Mass Stability: Better than ±0.1 amu over 8 hours

Resolution: Better than 10% valley between peaks of equal height throughout the mass range

Operating Temperature: 70°C (controlled to ±1°C)

Weight: 33 lbs. (15 kg) to bolt on process system

Mechanical Support: Optional stands and brackets are available

Pneumatics: 60-80 psig CDA

Electronics Weight on Flange: 1.7 kg

Power Requirements: 88-264 VAC, 47/63 Hz, 600 Watts

Communication: Ethernet, CAT-5e

Shipping Weight: 132 lbs (60 Kg) may vary depending upon backing pump and instrument rack requirements

Compliance: CE, UKCA

Literature

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