Nordson FlexTRAK プラズマ処理システム (5.5 liters)

Enclosure Dimensions: W x D x H – Footprint: 382W x 1210D x 1595H mm; 2037H mm with Light Tower 15W x 47.6D x 62.8H in. (80.2H in. with light tower)

Net Weight: 275 kg (605 lbs.)

Equipment Clearance: Right, Left – 153 mm (6 in), Front, Back – 914 mm (36 in)

Chamber Maximum Volume: 5.5 liters (338 in³)

Electrodes: 

Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power

Working Area: 305W x 305D mm (12W x 12D in.)

RF Power:

Standard Wattage: 600 W

Frequency: 13.56 MHz

Gas Control: 

Available Flow Volumes: 50, 100, or 250 sccm

Maximum Number of MFCs: 3

Control System and Interface

Software Control: EPC with PC-based touchscreen interface

Remote Interface: SMEMA, SECS/GEM

Vacuum Pump: Standard Purged Dry Pump: 16 cfm

N2 Purged Pump Flow: 2 slm

Brochure