Stanford RGA100 残留ガス分析計 (1 - 100 amu)

Mass range: 1 to 100 amu

Mass filter type: Quadrupole

Detector type: Faraday cup — std.; electron multiplier —  opt.

Resolution: Better than 0.5 amu at 10 % peak height (per AVS std. 2.3). Adjustable to constant peak width throughout the mass range.

Sensitivity (A/Torr): 2 × 10-4 (FC),<200 (EM). User adjustable throughout high voltage range. Measured with N2 at 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current.

Min. detectable partial pressure: 5 × 10-11 Torr (FC); 5 × 10-14 Torr (EM). Measured with N2 at 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current.

Operating pressure: 10-4 Torr to UHV (FC); 10-6 Torr to UHV (EM)

Max. operating temp.: 70 °C

Bakeout temperature: 300 °C (without ECU)

Ionizer:

Design: Open ion source, cylindrical symmetry, electron impact ionization.

Material: SS304 construction

Electron energy: 25 to 105 V, programmable

Ion energy: 8 or 12 V, programmable

Focus voltage: 0 to 150 V, programmable

Electron emission current: 0 to 3.5 mA, programmable

General:

Probe dimension: 8.75" from flange face to top of ionizer

Probe insertion: 2.0"

Probe mounting flange: 2.75" CF

Minimum tube I.D.: 1.375"

ECU dimensions: 9.1" × 4.1" × 3.1" (WHL) Easily separated from the probe for bakeout.

LED indicators: Power ON/OFF, filament ON/OFF, degas ON/OFF, electron multiplier ON/OFF, RS-232 Busy, Error, Overpressure, Burnt Filament.

Warm-up time: Mass stability ±0.1 amu after 30 minutes

Computer interface: RS-232C, 28,800 baud with high-level command set

Software: Windows based application

Power requirement: 24 VDC at 2.5 amps. Male DB9 connector. Optional 110/120/220/240 VAC adapter.

Weight: 6 lbs.

Datasheet

Manual