TOB TOB-DSP-1200℃-RTP Rapid Heating Furnace (1200℃,24KW)

Power: 24KW

Reaction chamber size: Dia180X200mm

Voltage: 380V

Phase: 3-phase

Heating element: Rapid heating pipe

Temperature control mode

1.Yudian temperature control: 30 sections can only use PID temperature regulation.

2.FP93 temperature control (from Japan)

Temperature control accuracy: +/- 1 ℃

Temperature Repeatability: +/- 1 ℃

Temperature measurement accuracy: +/- 0.2 ℃

Temperature field balance: +/- 2 ℃

Temperature status process time: 2-100 (100-1050 ℃)

Trigger: Three-phase phase-shift trigger  soft start

SCR: 106 / 16E Germany Semikron

Max temperature: 1200 ℃

Rated temperature: 1100 ℃

Stable operating temperature: 100-1000 ℃

The fastest heating rate: 300 ℃ / S

Cooling rate: 1~300, can be used to open or remove the tube furnace cooling started simultaneously cooling gas flow meter control valve controlled cooling.

Thermocouple Type: S-type

Heating length: 350mm

Vacuum degree

1.General vacuum and drive gas out by:TW-1.5A

2.2XZ-2 Vacuum degree pumps can be able to get around 10Pa

3.TOB-DSP-VS 0.1vacuum system can pumped 0.1Pa

4. TOB-DSP-VS high vacuum system enables vacuum degree pumped 10-3 Pa.

Surrounding surface temperature: ≤45℃

Security System: overcurrent protection

Datasheet