AeroTrak TSI 9001-01 粒子カウンタ

+ 10 nm sensitivity

+ 0.1 CFM (2.83 l/min) sample flow

+ Low false-count rate (< 0.07 count/ft3) provides accurate

measurements at low particle concentrations

+ Fast response

+ Uses Ultra-Pure or DI water as working fluid, keeping alcohol or

other chemicals out of the cleanroom

+ Data Storage: 250 zones, 999 locations, and 10,000 samples

+ USB, USB storage device, and Ethernet data transfer

+ External reporting via TrakPro™ Lite Secure Software

+ Industry’s loudest audible alarm

+ Easy, icon-driven touch screen operation

+ Allows storage and recall of specific recipes and zone configurations

+ Works with optional AeroTrak® 7950 High Pressure Diffuser (HPD)

for measurement of high pressure gases (CDA, N2, AR)

+ 316L stainless steel enclosure