VINE TFM-100 膜厚計 (350 – 1,050 ㎚​​/ 0.5 – 100 ㎛)

​Thickness range: 0.5 ㎛ – 100 ㎛

Wavelength range: 350 ㎚ – 1,050 ㎚​​

Spot size: Approximately 4 mm​​

Repeatability: <± 0.001 ㎛ at 1 ㎛ SiO2 on Si wafer

Light source: Tungsten halogen 1–6 W​  

Sample stage: 20 cm x 20 cm

Dimensions 

Detector: 22 cm × 22 cm × 7 cm (H)

Light source: 12 cm x 17 cm x 5 cm (H)

Stage: 20 cm x 20 cm x 17 cm (pole H)

 Weight​: Approximately 5 kg ​ 

Power​: 12 V / 1 A ​ 

Applications: 

- Semiconductor 

- Display

- Conductive oxides

- Protective coatings

- PCB coating process

- Parylene coatings

- Hard coatings

- Lens coatings

- Bio medical applications

- Adhesive coatings

- Polymer films (ex. PET)

- Thick photo-resists (ex.SU-8)

Datasheet