MKS DLT4B DELTA™ IV 4ゾーン 流量比制御装置 (500-10000sccm; EtherCAT)

Full Scale Flow Range: 500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q)

Maximum Operating Outlet Pressure: 200 Torr at maximum flow rate through all channels

Maximum Allowable Outlet Pressure Differential: 50 Torr with the same percentage flow through all channels

Normal Operating Pressure Differential: <150 Torr, Except, <450 Torr for 10K/10K

Ratio Control Range: 0, 5 to 100% Full Scale

Ratio Accuracy: ± 2% set point (for percent set points above 10%)

Ratio Repeatability & Reproducibility: ±0.3% of set point

Resolution: 0.02% of channel Full Scale

Zero Temperature Coefficient: 0.05% Full Scale/°C (500 ppm)

Span Temperature Coefficient: <0.08% of Reading/°C (800 ppm)

Typical Settling Time: <3 seconds (typical dependent on downstream conductance matching)

Warm-up Time: 60 minutes

Operating Temperature: 10-40°C

Storage Temperature: -20-65°C

Storage Humidity: 0-95% relative humidity, non-condensing

Temperature Accuracy: +2°C

Temperature Resolution: 0.1°C

Fitting Type: 4 VCR male, non-rotatable

Connector: 5 pin microconnector

Communication: EtherCAT

Compliance: CE

For specific range please check the attachment below!