Advanced Energy Paramount Plus MF RF Plasma Generator (5/15kW,2MHz)

- Power level: 5 and 15 kW
- Frequency: 2 MHz, frequency tuning ± 10%
- Available Interfaces: RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT
- AC Input: 200/240 VAC, 400/480 VAC
- Line Frequency: 50/60 Hz
- Cooling: Air and water
- Operating Ambient Temperature Range: +5°C ~ +40°C, +41°F ~ +104°F
- Advanced Features: Multi-level pulsing, arc management, CEX

Datasheet