Advanced Energy Paramount VHF RF Plasma Generator (7.0kW, 60MHz)

- RF Power: 3.0 kW, 6.0 kW, 7.0 kW
- Frequency:
27 MHz, 40 MHz
60 MHz, Frequency tuning ±5%
- Typical Tune Time: < 10 ms
- Power Accuracy into 50 Ω: ±1 W or ±1% of set point, whichever is greater
- Pulsing Frequency Range: 10 Hz ~ 25 kHz
- Available Serial Interface: RS-232, Ethernet, DeviceNet®, Profibus, EtherCAT®

Datasheet