Advanced Energy PDX 5000 RF Plasma Generator (100~5000W, 330~460kHz)

- RF Output Power: 100 ~ 5000 W
- Frequency: 330 ~ 460 kHz
- Maximum Reflected Power: 1500 W
- Harmonics: At full rated power, all harmonics are > 40 dB below the fundamental output frequency.
- Input Voltage: 180 ~ 230 VAC, 50/60 Hz, 3φ
- Input Current: 18 A nominal
- Maximum Output Voltage: 735 V
- Maximum Output Current: 14.9 A
- Regulatory Accuracy: 1% of set point or 5 W, whichever is greater
- Operating Temperature:
5° C (41°F) min
30° C (86°F) max
- Cooling: Water, 2 gpm (7.6 lpm) at 0 ~ 30° C (32 ~ 86°F)
- Size:
178 mm (H) x 483 mm (W) x 508 mm (D)
7" (H) x 19" (W) x 20" (D)
standard rack mount
- Weight: 41 kg (90 lb)

- Serial Port Connector RS-232 or RS-485, 9-pin, sub-miniature D, female

Datasheet