Brooks Instrument CMX-3 정전용량형 마노미터 (160°C, ±0.25%, 8VCR(1/2''))

Sensor Temperature: 160°C

Electrical Connector: 15-Pin D Sub Connector with 2 Process Relays and a Temperature in Control Relay

Fitting: 8 VCR (1/2") Female

Ambient Operating Temperature:  15°C to 35°C

Full Scale Pressure Range: 1Torr

Accuracy: ±0.25% of Reading

Response Time: Pressure: 40mSec

Zero Temperature Coefficient:0.002% Full Scale/°C

Span Temperature Coefficient: 0.02% Reading/°C

For more details, see datasheet.

Datasheet

User Manual