X-axis measuring range: 0~200mm
X-axis indication error: ±(0.6+1.5L/100)µm
Z0-axis measuring range: ±25mm
Z0-axis resolution: 0.01μm
Z0-axis indication error: ±(0.6+|4H|/100)µm
Scanning speed: 0.05~5mm/s adjustable
Manufacturer: Chotest Technology Inc.