Fcon M2020-4S2-50-H2 디지털 질량 유량계 (50SCCM)

Flow range: 10SLM/ 20SLM

Gases: H2

Output signal: Main unit display: 7 segment LED, Digital: RS485, Analog: 0-5V and 4-20mA can be switched

Repeatability: ±0.2％ F.S

Response: ≦2sec

Operating differential pressure: 100-300KPa (10SLM)/ 200-300KPa (20SLM)

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃)

Leak integrity: 1×10-7Pa･m3/sec He

Drive power source: +24VDC： ≧500mA

Communication: RS485, Analog 0-5VDC and 4-20mA can be switched

Wetted surface material: SUS316, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Standard fitting: 1/4in.SWL

Accessory: User's manual, Written guarantee

Datasheet