Kentek MEZUS 510 멀티 캘리브레이터

Flow Range of Dilution Air: 0 ~ 10 SLPM

Flow Range of Cylinder Gases: 0 - 100 cc/min

Flow Measurement Accuracy: ±1 % of full scale

Repeatability of Flow Control: ±0.5% of full scale

Linearity of Flow Measurements: ±0.5% of full scale

Cylinder Gas Input Port: 3

Diluent Air Input Port: 1

Gas out Port: 1

Display: 7 inch Graphic LCD

Ambient temperature: 5 - 40°C

Power requirement: 220VAC/60Hz or 230VAC/50Hz

Ozone Generator Module (Options):

Ozone Output: 0.1 - 5 ppm LPM

Response Time: < 180 seconds(T95)

Datasheet