KoCoS WATOM LS323 Edge Profile Grinding Process Control (200/300mm; laser class 3)

Throughput: 50 wafers/h with 16 profile measurement points, notch measurement and diameter measurement

MTBF: 1000 h

MTTR: 1 h

Accuracy (Radii): ± 1 μm (standard deviation 1 μm)

Accuracy (Half angles): ± 0.2° (standard deviation 0.05°)

Accuracy (Blunt lengths): ± 2 μm (standard deviation 1 μm)

Accuracy (Facet lengths): ± 2 μm (standard deviation 1 μm)

Profile deformation: > 5 μm

Control interface: Ethernet

Input voltage: 88 to 264 VAC, 47 to 63 Hz

CDA: 0.6 MPa (87 psi)

Vacuum: 68 kPa (9.8 psi)

Operating temperature: 20 to 24°C

Sensor types: LS3 (laser class 3)

Diameters: 23 (200/300 mm)

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