Mahr MarSurf CD 280 BG 11 윤곽 측정 스테이션 (X 280mm, 70mm)

Resolution: max. 6 nm (with 210 mm probe arm)

Start of traversing length (in X):0.1 mm

Probe arm length: 210 mm; 350 mm; 490 mm

End of traversing length (in X):280 mm

Version mit 350 mm

Without angular adjustment of the X-axis

Positioning speed: 0.02 – 200 mm/s (in X)

Guide deviation: 0.350 µm/60 mm,0.400 µm/140 mm,0,75µm/280 mm

Measuring speed: 0.02 – 10 mm/s

Measuring range:70 mm (in Z with 350 mm probe arm)max. 100 mm (with 490 mm probe arm)

Measuring force:4 mN to 30 mN, in Z+ and Z-, adjustable via software

Optional:

Manual control panel with joystick and display

Motor-driven TY axis

Parallel vice

Prism block

Equipment table

Vibration damping system

General software options:

Option - ContourPlus

Option - MeasurementPlus

Option - Roughness in Contour view

Option - EasyRoughness

Option - QS-STAT / QS-STAT Plus

Option - Profile processing

Option - Topography