Measuring range (X×Y×Z):
+ Vision: 400×400×250 mm
+ Non-contact displacement sensor: 280×400×250 mm
Vision measuring accuracy:
+ E1X, E1Y: (0.8 + 2L /1000）µm
+ E1Z: (1.5 + 2L /1000）µm
+ E2XY: 1.4 + 3L /1000）µm
Displacement sensor measuring accuracy: E1Z: (1.5 + 2L /1000）µm
