MKS 317 Pirani 진공 압력 센서 (0.001-1000 Torr; 2.75 in. CF)

Measurement Range: 1.0 x 10^-3 to 1.0 x 10^+3 Torr

                                    1.3 x 10^-3 to 1.3 x 10^+3 mbar

                                    1.3 x 10^-1 to 1.3 x 10^+5 Pascal

Set Point Range: 2.0 x 10^-3 - 9.5 x 10^+2 Torr

                            2.7 x 10^-3 - 1.2 x 10^+3 mbar

                            2.7 x 10^-1 - 1.2 x 10^+5 Pascal

Resolution: 1% of indicated decade

Reproducibility: 5% of indicated pressure

Fitting Type: CF Flange

Connector: 9-pin D-sub

Operating Temperature: 0 - 50°C (32 - 122°F)

Bake Out Temperature: 100°C non-operating without cable and electronics

Exposed Materials: 304 stainless steel, nickel 200, glass, platinum

Internal Volume: 0.5 in3 (8.0 cm3) max.

Cable: Multiconductor shielded cable

Literature

Drawing