MKS 423 냉음극 진공 압력 센서 (1x10-11~1x10-2 Torr; NW40 ISO-KF)

Sensor Type: Cold Cathode

Measurement Range: 1 x 10-11 to 1 x 10-2 Torr

Fitting Type: NW40 ISO-KF

Exposed Materials: Stainless steel, 6061 aluminum, Inconel®, glass and alumina ceramic

Repeatability: 5% of reading at constant temperature

Bake Out Temperature: 400°C (752°F) with CF flanges and magnet and cable removed

Operating Temperature: 0 - 70°C (32 - 158°F)

Calibration Gas: Air, Nitrogen

Installation Orientation: Any

Internal Volume: 0.9 in3 (15 cm3) max.

Literature

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