MKS 903 Cold Cathode 진공 변환기 (Inverted Magnetron, 2.75 in. CF)

Sensor Type: Cold Cathode

Measurement Range: 3.0 x 10^-10 - 5.0 x 10^-3 Torr

Set Point Range: 1.0 x 10^-9 - 1.0 x 10^-3 Torr

Repeatability: 5% of Reading (approximate)

Calibration Gas: Air/Nitrogen

Fitting Type: CF Flange

Flange Size: 2.75 in.

Operating Temperature: 0 - 50°C (32 - 122°F)

Bake Out Temperature: 400°C (752°F) without electronics

Relative Humidity: 80% maximum for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°C

Set Point Response: <50 msec (0 - 99%) for Dp from 5.0 x 10-8 - 3.0 x 10-4 Torr

Relays: 1 relay set point

Relay Contact Rating: 1 Amp @ 30 VDC, resistive

Power Requirements: 14 - 30 VDC, 3 Watts max.

Exposed Materials: 304 and 302 stainless steel, aluminum, Inconel® X-750, glass, alumina ceramic

Case Material: ABS plastic, UL94-5V flame rating (with conductive coating)

Internal Volume: 0.9 in3 (15.0 cm3) max.

Display: Set point (red), high voltage (yellow), power (green)

Output Voltage: 1.5 - 8.7 VDC, 30 Ohm maximum output impedance

Compliance: CE

Literature

Manual

Drawing