MKS 1179C General Purpose Mass Flow Controller with Elastomer Seals (10 - 20000 sscm)

Control Range: 2% to 100% of Full Scale

Full Scale Flow Range: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)

Fitting Type: Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®

Analog I/O Connector: 9-pin or 15-pin Type "D"

Seal Material: Buna-N, Neoprene®, Kalrez®

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 10 to 40 psid (10 to 5000 sccm)

                                                                15 to 40 psid (10000 to 30000 sccm)

                                                                (with atmospheric pressure at the MFC outlet)

Typical Accuracy: ±1.0% of Full Scale

Repeatability: ±0.2% of Full Scale

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading./°C

Pressure Coefficient: <0.02% of Reading/psi

Warm-up Time: 2 minutes

Typical Settling Time: <2 sec

Operating Temperature: 0° to 50°C

Power Requirements: ±15 VDC (200 mA start-up, 100 mA steady-state)

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing