MKS 179C 범용 금속 밀봉 질량 유량계 (10 sccm - 20 slm)

Full Scale Flow Range: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)

Fitting Type: Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®

Analog I/O Connector: 9-pin or 15-pin Type "D"

Maximum Inlet Pressure: 500 psig

Normal Operating Pressure Differential: 10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)

Typical Accuracy: ±1.0% of Full Scale

Repeatability: ±0.2% of Full Scale

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading./°C

Pressure Coefficient: <0.02% of Reading/psi

Warm-up Time: 2 minutes

Operating Temperature: 0° to 50°C

Power Requirements: ±15 VDC (150 mA start-up, 50 mA steady-state)

Wetted Materials: 316L S.S.

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing