MKS 392 Micro-Ion® Plus 모듈식 진공 압력 변환기 (2.75 in. CF; EtherCAT)

Absolute Measurement Range: 1.0 x 10-9 to 760 Torr

Digital Communication: EtherCAT

Type: Vacuum Gauge Module

Display: No

Relays: 2

Fitting Type: 2.75 in. CF

Operating Temperature: 10 - 40°C (50 - 104°F)

Maximum Bakeout Temperature: 105°C (221°F) maximum, with electronics removed

Storage Temperature: -40 to +70°C (-40 to +158°F)

Analog Output: Logarithmic, 0.5 to 7.0 VDC, 0.5 V/decade

Internal Volume: 10.8 cm3 (0.65 in3)

Exposed Materials: 304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass

Electronic Casing and Flange: Aluminum Extrusion with Powder-coat

Compliance: CE

Filament: Yttria-coated Iridium

Response Time: <25 mseconds

Connectors: 15-pin subminiature-D male, two RJ45

Units: Torr

X-ray Limit: <3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal

Literature

Manual