MKS 946 진공 시스템 컨트롤러 (6-CH; 10.000~10^-11 Torr)

Measurement Range: 10,000 Torr to 10^-11 Torr (Dependent upon sensor type)

Display: 320x240 color QVGA TFT LCD with back lighting

Front Panel Controls: Power on-off switch, setup and operational commands can be accessed  via the keypad

Units: Pressure: Torr, mbar, Pascal

          Flow: sccm and slm

Power Requirements:100 - 240 VAC 50/60 Hz 150 W maximum

Analog Output: Buffered, log linear and linear output for each channel and log linear for combined channels

Set Point Contact Rating: 2 amps @ 30 VAC

Set Point Configuration: Twelve pressure dependent SPST set point relays

Operating Temperature: 5° to 40°C (41° to 104°F)

Storage Temperature: 10° to 55°C (50° to 131°F)

Mounting: 1/2 rack, 2U High, 13 inches deep

Weight: 8 lbs. (3.6 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

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