MKS AX2600-AX2700 마이크로파 플라즈마 서브시스템 (1.8 / 3kW; 2440-2470MHz)

Maximum Plasma Power Output: 1.8 or 3.0 kW

Frequency: 2440 - 2470 MHz

Output Accuracy: ±1.5% (from 20 - 100% of max. power)

Power Requirements: 200/208 VAC ±10%, 3 phase, 50/60 Hz

Chemistries: O2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3

Applicator Material: Quartz, Sapphire

Operating Pressure: 2 - 8 Torr

Communications: Analog, RS485, DeviceNet™ or EtherCAT®

Compliance: CE, ETL, SEMI S2-93A, SEMI F47

Time to Match: < 2 sec

Total Gas Flow: 1 - 7 slm

Literature