MKS AX7610S 화학적 다운스트림 플라즈마 소스 (3 kW, Sapphire)

Maximum Power: 3.0 kW

Electrical Requirements for UV Lamp: 24 VDC, 1.0 Amp

Cooling: Water (3/8 in. Swagelok® fitting) 0.35 gpm, 30°C Max at 30psid minimum

Gas Line Connection: 1/4 or 3/8 inch VCR®

Output Flange: KF40, KF50 or custom

Process Gas Supply:

- Quartz Tube: O2, N2, H2O, Ar, non-fluorine based gases and perating pressure 1 to 8 Torr typical

- Sapphire Tube: O2, N2, H2O, Ar, NF3, CF4, C2, F6, and other Fluorine based gases

Operating pressure* 2 to 8 Torr typical

Dimensions: 15.3 in (388 mm) Long

Weight: 10 lb. (4.5 kg)

Literature