MKS AX8407 SEMOZON® 고농도, 고유량 오존 발생기 (5 - 40 slm)

Ozone Output: up to 335 g/Nm3

Flow Rate: 5 - 40 slm

Feed Gas: Oxygen: Grade 6 or better O2

                  Nitrogen: 100 - 1000 ppm grade 5 or better N2

Nominal Cell Pressure (Delivery): 15 - 45 psig (100 - 310 kPa)

Pressure: 20 - 30 psig

Control Interface: Front Panel Control and Remote Operation

Cooling Water Temperature: 5 - 25°C (41 - 77°F)

Cooling Water Filtration: 100 microns

Cooling Water Quality: Resistivity ≥50 KΩ/cm

Minimum Water Flow: 7.6 lpm (2.0 gpm) minimum

Voltage Requirements: 208 VAC (±10%) 3 Ø & Ground, no Neutral

Current Requirements: 15 Amps

Frequency: 50/60 Hz

Weight: 59 kg (130 Lb)

Dimensions : 483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in) (width x depth x height)

Compliance: CE, UL/CSA and SEMI F47

Literature

Drawing

Application note