MKS AX8415 SEMOZON® Ultra Clean, 고농도, 고유량 오존 발생기 (2.5 - 50 slm)

Ozone Output: up to 425 g/Nm3

Flow Rate: 2.5 - 50 slm

Feed Gas: O2 Grade 6 or better, or N2 100 ppm Grade 5 or better (optional)

Ambient Temperature: 10 - 40°C (50 - 104°F)

Nominal Cell Pressure (Delivery): 15 - 45 psig (100 - 310 kPa)

Pressure: 20 - 50 psig

Control Interface: Front panel control and remote operation

Cooling Water Temperature: 5 - 25°C (41 - 77°F)

Cooling Water Filtration: 100 microns

Cooling Water Quality: Resistivity ≥ 50 kΩ/cm

Minimum Water Flow: 9.4 lpm (2.5 gpm)

Voltage Requirements: 208 VAC (±10%) 3Ø & GND, no neutral

Current Requirements: 20 Amp

Frequency: 50/60 Hz

Weight: 46.3 kg (102 lbs)

Dimensions: 483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in)

Compliance: CE, SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1

Literature

Drawing

Application note