MKS AX8555 SEMOZON® 4채널, 독립형 오존 전달 시스템 (0.5 - 5 slm)

Ozone Output: 26 - 180 g/hr per channel

Flow Rate: 0.5 - 5 slm per channel

Feed Gas: Oxygen, Nitrogen (20 - 100 ppm of total flow)

                  Carbon Dioxide (1000 - 2000 ppm of total flow)

Feed Gas Supply Pressure: 60 psig (4.2 kg/cm2) nominal, 75 psig (5.3 kg/cm2) maximum, N2/CO2 pressure 10 psi higher than O2 pressure

Feed Gas Purity: 99.9995% minimum

Operating Temperature: 41 - 104°F (5 - 40°C)

Cooling Water Temperature Required: 63 - 73°F (17 - 23°C)

Cooling Water Filtration Required: 20µm

Voltage Requirements: 208 volts AC (±10%), three phase

Current Requirements: 15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.

Frequency: 50/60 Hz

Pressure Indication: Inlet pressure gauge for each gas

Exhaust Flow Rate: 150 cfm (70.8 l/s)

Control Air Pressure: 70 - 100 psig

Dimensions: 24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)

Relative Humidity: 30 - 90% (non - condensing)

Weight: 600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators

Compliance: CE, S2 - 0302, F47

Altitude: Up to 3280 ft. (1000 m) above mean sea level

Literature

Drawing

Application note