MKS E27H 에칭 센서가 있는 가열식 절대 Baratron® 정전 용량 압력계 (Etch Sensor; 0.1Torr; 8VCR-F)

Measurement Type: Absolute

Sensor Temperature: 45°C

Full Scale Range: 0.1 Torr

Accuracy: 0.15% of Reading

Resolution: 0.001% of Full Scale

Fitting Type: 8 VCR female

Analog Output: 0-10 VDC

Analog Connector: 15-pin D-sub with Thread Locks

Calibration: Horizontal

Zero Temperature Coefficient: 0.005% of Full Scale/°C

Span Temperature Coefficient: 0.02% of Reading/°C

Operating Temperature Range: 15-40°C

Volume: 6.3 cc

Warm-up Time: 4 hours

Power Requirements: ±15 VDC ±5% @ 0.25 Amps (max.)

Indicators: No

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing