MKS IE500A-MFM 엘라스토머 밀봉 질량 유량계 (250-500 slm)

Full Scale Flow Range: 250-500 slm

Measurement Range: 0.2-100 % Full Scale

Maximum Inlet Pressure: 150 psig

Burst Pressure: 1500 psig

Typical Accuracy: ±1% of Reading (with N2 calibration gas)

Repeatability: ±0.5% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.03% of Reading/psi

Warm-up Time: 1 hour

Operating Temperature: 10-50°C

Storage Humidity: 0 to 95% relative humidity, non-condensing

Storage Temperature: -20° to 65°C (-4° to 149° F)

Enclosure Rating: IP66

Power Requirements: 15-24 VDC @ (<4 watts)

Flow Input Output Signal: Voltage (0-5 VDC)

                                        Current (4-20 mA)

Analog I/O Connector: 15 pin Type D male

Weight: <10.8 lbs (4.9 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing