MKS IM100A-MFM 금속 밀봉 질량 유량계 (50-100 slm)

Full Scale Flow Range: 50,000-100,000 sccm (N2 equivalent)

Measurement Range: 0.1% to 100% of Full Scale

Maximum Inlet Pressure: 500 psi

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Typical Accuracy: ±1% of Reading

Repeatability: ±0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.02% of Reading/psi

Warm-up Time: 30 minutes

Operating Temperature: 10-50°C

Storage Humidity: 0 to 95% relative humidity, non-condensing

Storage Temperature: -20° to 80°C (-4° to 176° F)

Enclosure Rating: IP66

Power Requirements: +15 to +24 VDC @ (<2 watts)

Flow Input Output Signal: Voltage (0 to 5 VDC)

                                         Current (4 to 20 mA)

Analog I/O Connector: 15 pin Type "D" male, 9 pin Type "D" male

Weight: <2.5 lbs (1.1kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing