MKS P9B 고성능 압력에 둔감한 질량 유량 컨트롤러 (5 - 50000 sccm)

Full Scale Flow Range: 5 to 50,000 sccm (N2 equivalent)

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 10 to 5000 sccm; 10 to 40 psid

                                                                10000 to 20000 sccm; 15 to 40 psid

                                                                10000 to 20000 sccm; 15 to 40 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Control Range: 2% to 100% of Full Scale

Typical Accuracy: ±1% of set point for 20-100% Full Scale

                             ±0.2% of Full Scale for 2-20% Full Scale

Repeatability: ±0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: < 0.05% of Full Scale/°C

Span Temperature Coefficient: < 0.08% of Reading/°C

Inlet Pressure Coefficient: < 0.02% of Reading/psi

Typical Settling Time: < 750 msec., typical above 5% Full Scale

Warm-up Time: 30 minutes

Operating Temperature: 10° to 50°C

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Storage Temperature: -20° to 80°C

Temperature Display: 0 to 100°C

Temperature Accuracy: ±2°C

Temperature Resolution: 0.1°C

Display: 4 digits for value, 4 characters for unit

Pressure Display: 0 to 100 psia

Pressure Readout Units: psia, kPA

Pressure Accuracy: 1% Full Scale

Pressure Resolution: 0.1 psia

Valve Seat Material: PTFE (Teflon)

Weight: 3 lbs (1.4 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing