MKS VISION-2000-E 다중 압력 및 CVD/ALD 공정용 잔류 가스 분석기 (1-200 amu)

Mass Range: 1 - 200 amu

Ion Source: High conductance closed ion source

Filaments: Twin Tungsten filaments

Mass Filter: Double filter (1 in. "RF only" pre-filter with 4 in. main filter)

Detector: Dual (Faraday and secondary electron multiplier)

Mass Stability: Better than ±0.1 amu over 8 hours

Resolution: Better than 10% valley for peaks of equal height across mass range

Bake Out Temperature: 180°C with Bakeout Jacket

Operating Temperature: 90°C (controlled to ±1°C)

Weight: 33 lbs. (15 kg) to bolt on Process System

Mechanical Support: Optional stands and brackets are available

Pneumatics: 60-80 psig CDA

Electronics Weight on Flange: 1.7 kg

Power Requirements: 88 - 264 VAC, 47/63 Hz, 600 W

Maximum Operating Conditions: Electronics: 10 - 40°C, 80% RH (non condensing)

Communication: Ethernet CAT-5e

Shipping Weight: 44 lbs (20 kg) may vary depending upon backing pump and instrument rack requirements

Type: Residual Gas Analyzer

Measurement Technique: Mass Spectrometry

Compliance: Compliant to RoHS Directive 2002/95/EC (control unit)

Literature

Drawing