Nordson FlexTRAK-CDS 플라스마 처리 시스템 (9.6 liters)

Enclosure Dimensions: W x D x H – Footprint: 1190W x 1320D x 1640H; 2114H mm with Light Tower (47W x 52D x 65H; 83H in. with Light Tower)

Net Weight: 550 kg (1213 lbs.)

Equipment Clearance Right, Left, Back – 254 mm (10 in.), Front – 940 mm (37 in.)

Chamber Maximum Volume: 9.6 liters (585 in³)

Electrodes: 

Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power

Working Area: 305W x 550D mm (12W x 21D in.)

RF Power:

Standard Wattage: 600 W

Frequency: 13.56 MHz

Gas Control: 

Available Flow Volumes: 50, 100, or 250 sccm

Maximum Number of MFCs: 3

Control System and Interface

Software Control: EPC with PC-based touchscreen interface

Remote Interface: SMEMA, SECS/GEM

Vacuum Pump: Standard Purged Dry Pump: 16 cfm

N2 Purged Pump Flow: 2 slm

Brochure