OAI 212 Large Area Mask Aligner

Substrate Size: Up to 12” square or 300mm

Substrate:

Stage X, Y Travel: ±10mm

Z Travel: 5mm

Micrometer: .001”; .0001”

Graduations: or .01mm; .001mm

Rotation: ±3.5˚

Mask: Size: Up to 14” x 14”

Lightsource:

Beam Size: Up to 12” square

Lamp Power: 200, 350, 500, 1.000, and 2.000 Watt NUV 500, 1.000 and 2.000 Watt DUV

Shutter Timer: Timer: 0.1 to 99.0 sec. at 0.1 second increments or 1.0 to 999 sec. at 1.0 second increments

Facilities:

Electrical: 110 or 220 vac (or other according to Power Supply requirements and Country)

Vacuum: 20 - 28” Hg.

Air and N2: CDA at 60 PSI and N2at 20 PSI

Exhaust: 0.35” to 0.5” Water

Dimensions:

Height: 42” (1067mm)

Width: 60” (1524mm)

Depth: 53” (1346mm)

Datasheet